SINGLE-CRYSTAL LITHIUM NIOBATE THIN FILM (LNOI)
SINGLE-CRYSTAL LITHIUM TANTALATE THIN FILM (LTOI)
300~900nm, 5-50μm

300-900 nm Lithium Niobate Thin Films (LNOI)

300-900 nm Lithium Niobate Thin Films (LNOI)

Top Functional Layer

Diameter

3, 4, (6) inch

Orientation

X, Z, Y etc.

Material

LiNbO3

Thickness

300-900 nm

Doped (optional)

MgO

 

 

Isolation Layer

Material

SiO2

Thickness

1000-4000 nm

Substrate

Material

Si, LN, Quartz, Fused Silica etc.

Thickness

400-500 μm

Optional Electrode Layer

Material

Pt, Au, Cr

Thickness 

100-400 nm

Structure

Above or Under SiO2 Isolation Layer

Direction of application:

 

· Electro-Optic Modulators      · Delay Lines

· Electro-Optic Q Switches       · X-BAR  

· Phase Modulator Devices      · Nonlinear Optics          

· Ferroelectric Memory Devices 

 

300-900 nm Lithium Tantalate Thin Films (LTOI)

300-900 nm Lithium Tantalate Thin Films (LTOI)

Top Functional Layer

Diameter

3, 4, 6 inch

Orientation

 Y-42Y-46.3, Z etc.

Material

LiTaO3

Thickness

300-900 nm

Isolation Layer

Material

SiO2

Thickness

300-4000 nm

Substrate

Material

Si

Thickness

400-500 μm

Direction of application:

 

· Resonators

· High Performance ,Surface Acoustic,Wave Filters  

 

 

5-50 μm LT & LN on Si

5-50 μm LT & LN on Si

Top Functional Layer

Diameter

3, 4, 6 inch

Orientation

X, Z, Y-42Y-46.3 etc.

Material

LiTaO3, LiNbO3 etc.

Thickness

5-50 μm

Substrate

Material

Si

Thickness

230-500 μm

Direction of application:

 

· Acousto-optic modulator           · TC-SAW filters   

· Terahertz Source  

 

 

Free Standing Ultra Thin Wafers & Ultra Flat Wafers

Free Standing Ultra Thin & Ultra Flat Wafers

Diameter

3, 4 inch

Orientation

X, Y, Z etc.

Thickness

10-60 um

Material

LN, LT, Si etc.

Surface

Double or Single Side Polished

 

 

Direction of application:

 

· Pyroelectric Infrared Detector

· Terahertz Source

 

 

Customized Thin Films

Customized Lithium Niobate & Lithium Tantalate Thin Films

Top Layer/ Details

Substrate Details

Top Layer Thin Films Details

Multi Layer Structure

Patterned Electrode & Waveguide

Different Material (SiO2/Si, Si, Sapphire, Quartz etc.)

PPLN

Special Size

Electrode (Au, Pt, Cr, Al etc.)

Orientation (Same as Bulk Wafers )

Doped (MgO, Fe, Er, Tm etc.)

100-1000 nm LiNbO3

100-1500 nm LiTaO3

 

5-50 um

LiNbO3

 

 

 

 

5-50 um

LiTaO3